Cover Image

Advanced applications of ion implantation /

Bibliographic Details
Corporate Authors: Sira Limited, Society of Photo-optical Instrumentation Engineers
Other Authors: Current, Michael I., Sadana, Devendra K.
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE--The International Society for Optical Engineering, [1985]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 530.
Subjects:
Ion implantation > Congresses.
Semiconductors > Congresses.
Description
Physical Description:vi, 263 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0892525657 (pbk.)