Ion implantation : science and technology /
| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Orlando, FL :
Academic Press,
1984.
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| Subjects: |
| Physical Description: | xi, 635 pages : illustrations |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0127806202 (alk. paper) |