Impurity doping processes in silicon /
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Amsterdam ; New York :
North-Holland Pub. Co. ;
[1981]
|
| Series: | Materials processing, theory and practices ;
v. 2. |
| Subjects: |
| Physical Description: | 643 pages : illustrations ; 23 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0444860959 |