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Bibliographic Details
Other Authors: Newman, Roger
Format: Book
Language:English
Published: Amsterdam ; New York : North-Holland Pub. Co. ; 1980.
Series:Materials processing, theory and practices ; v. 1.
Subjects:
Integrated circuits > Large scale integration.
Lithography.
Description
Physical Description:vii, 481 pages ; 23 cm.
Bibliography:Includes bibliographies and index.
ISBN:0444853510