Semiconductor processing : a symposium /

Bibliographic Details
Corporate Authors:	ASTM Committee F-1 on Electronics, Symposium on Semiconductor Processing
Other Authors:	Gupta, D. C. (Dinesh C.)
Format:	Conference Proceeding Book
Language:	English
Published:	Philadelphia, PA : ASTM, [1984]
Series:	ASTM special technical publication ; 850.
Subjects:	Semiconductor industry > Congresses.

Description
Item Description:	"ASTM publication code number (PCN) 04-850000-46." "The Third Symposium on Semiconductor Processing was held at San Jose, California on 7-10 February, 1984 ... "
Physical Description:	671 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographies and index.
ISBN:	0803104030