Laser assisted deposition, etching, and doping : January 26-27, 1984, Los Angeles, California /
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash. :
SPIE--The International Society for Optical Engineering,
1984.
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 459. |
| Subjects: |
| Physical Description: | vi, 139 pages : illustrations ; 28 cm. |
|---|---|
| Bibliography: | Incudes bibliographical references and index. |
| ISBN: | 0892524944 |