rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Advances in resist technology
    sub title: March 12-13, 1984, Santa Clara, California
  name:
    name part: Willson, C. G. (C. Grant)
    name part: 1939-
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: wau
    date issued: 1984
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: vi, 195 pages : illustrations ; 28 cm.
  note: C. Grant Willson, chairman/editor.
  note: Includes bibliographical references and index.
  subject:
    topic: Photoresists
    genre: Congresses
  subject:
    topic: Lithography
    topic: Congresses
  subject:
    topic: Microelectronics
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 469
  record info:
    record content source: SCG
    record creation date: 840727
    record change date: 20151013175634.0
    record identifier: in00000537937