Precision surface metrology : August 23-24, 1983, San Diego, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Wyant, James C.
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE--the International Society for Optical Engineering, [1983]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 429.
Subjects:	Interferometry > Congresses. Surfaces (Technology) > Analysis > Congresses. Surface roughness > Measurement > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/0429.toc

Description
Physical Description:	vi, 207 pages : illustrations ; 28 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	0892524642