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Spectroscopic characterization techniques for semiconductor technology : 9-10 November 1983, Cambridge, Massachusetts /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Pollak, Fred H., Bauer, Robert S.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE--International Society for Optical Engineering, [1984]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 452.
Subjects:	Semiconductors > Testing > Congresses. Spectrum analysis > Congresses.

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