Spectroscopic characterization techniques for semiconductor technology : 9-10 November 1983, Cambridge, Massachusetts /
| Corporate Author: | |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE--International Society for Optical Engineering,
[1984]
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 452. |
| Subjects: |
| Physical Description: | vi, 203 pages : illustrations ; 28 cm. |
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| Bibliography: | Includes bibliographies and index. |
| ISBN: | 0892524871 (pbk.) |