APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Pollak, F. H., & Bauer, R. S. (1984). Spectroscopic characterization techniques for semiconductor technology: 9-10 November 1983, Cambridge, Massachusetts. SPIE--International Society for Optical Engineering.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Fred H. Pollak, and Robert S. Bauer. Spectroscopic Characterization Techniques for Semiconductor Technology: 9-10 November 1983, Cambridge, Massachusetts. Bellingham, Wash., USA: SPIE--International Society for Optical Engineering, 1984.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Spectroscopic Characterization Techniques for Semiconductor Technology: 9-10 November 1983, Cambridge, Massachusetts. SPIE--International Society for Optical Engineering, 1984.