Semiconductor technologies : 1982 /
| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Tokyo : Amsterdam ; New York :
OHM ; North-Holland,
1982.
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| Series: | Japan annual reviews in electronics, computers & telecommunications.
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| Subjects: |
| Physical Description: | iv, 348 pages, 2 unnumbered pages of plates : illustrations (some color) ; 27 cm. |
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| Bibliography: | Includes bibliographical references. |