rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Silicon processing
    sub title: a symposium
  name:
    name part: Gupta, D. C. (Dinesh C.)
  name:
    name part: ASTM Committee F-1 on Electronics
  name:
    name part: United States
    name part: National Bureau of Standards.
  name:
    name part: Stanford University
  name:
    name part: Symposium on Silicon Processing (1982 : San Jose, Calif.)
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: pau
    date issued: 1983
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: 559 pages : illustrations ; 24 cm.
  note: sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982 / D.C. Gupta, editor.
  note: Papers presented at the Symposium on Silicon Processing, held in San Jose, Calif., Jan 19-22, 1982.
  note: "ASTM publication code number (PCN) 04-804000-46."
  note: Includes bibliographical references and index.
  subject:
    topic: Silicon
    genre: Congresses
  subject:
    topic: Semiconductors
    genre: Congresses
  classification: TK7871.15.S55 S55 1983
  classification: 621.3815/2
  related item:
    title info:
      title: ASTM special technical publication ; 804
  identifier: 82083529
  record info:
    record content source: DLC
    record creation date: 840116
    record change date: 20151013071554.0
    record identifier: in00000507056