http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Symposium on Silicon Processing (1982 : San Jose, Calif.)
sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982 / D.C. Gupta, editor.
Papers presented at the Symposium on Silicon Processing, held in San Jose, Calif., Jan 19-22, 1982.
"ASTM publication code number (PCN) 04-804000-46."
Includes bibliographical references and index.
ASTM special technical publication ; 804