Cover Image

Laser processing of semiconductor devices : January 18-19, 1983, Los Angeles, California /

Bibliographic Details
Corporate Authors: Materials Research Society, Society of Photo-optical Instrumentation Engineers
Other Authors: Tang, Charles C.
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE--the International Society for Optical Engineering, [1983]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 385.
Subjects:
Microelectronics.
Lasers > Industrial applications.
Description
Physical Description:vi, 155 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:0892524200 (pbk.)