APA (7th ed.) Citation

Materials Research Society, Society of Photo-optical Instrumentation Engineers, & Tang, C. C. (1983). Laser processing of semiconductor devices: January 18-19, 1983, Los Angeles, California. SPIE--the International Society for Optical Engineering.

Chicago Style (17th ed.) Citation

Materials Research Society, Society of Photo-optical Instrumentation Engineers, and Charles C. Tang. Laser Processing of Semiconductor Devices: January 18-19, 1983, Los Angeles, California. Bellingham, Wash.: SPIE--the International Society for Optical Engineering, 1983.

MLA (9th ed.) Citation

Materials Research Society, et al. Laser Processing of Semiconductor Devices: January 18-19, 1983, Los Angeles, California. SPIE--the International Society for Optical Engineering, 1983.