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Proceedings /

Bibliographic Details
Corporate Authors: U.S.-Japan Seminar on Ion Implantation in Semiconductors Kyoto, National Science Foundation (U.S.), Nihon Gakujutsu Shinkōkai
Other Authors: Namba, Susumu, 1928-
Format: Conference Proceeding Book
Language:English
Published: [Tokyo] : Japan Society for the Promotion of Science, 1972.
Subjects:
Ion implantation > Congresses.
Semiconductors > Congresses.
Description
Item Description:Sponsored by the National Science Foundation and the Japan Society for the Promotion of Science.
Physical Description:200 pages ; 26 cm.
Bibliography:Includes bibliographical references.