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Ion implantation in semiconductors : science and technology : [proceedings of the fourth International Conference on Ion Implantation in Semiconductors and Other Materials, held at the Osaka Chamber of Commerce and Industry, August 1974] /

Bibliographic Details
Corporate Author: International Conference on Ion Implantation in Semiconductors and Other Materials Osaka
Other Authors: Namba, Susumu, 1928-
Format: Conference Proceeding Book
Language:English
Published: New York : Plenum Press, [1975]
Subjects:
Ion implantation > Congresses.
Semiconductors > Effect of radiation on > Congresses.
Metals > Effect of radiation on > Congresses.
Description
Physical Description:xv, 742 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:030630841X