http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Technological advances in micro and submicro photofabrication imagery
[seminar], August 21-23, 1974, San Diego, California
viii, 136 pages : illustrations ; 28 cm.
Proceedings of SPIE--the International Society for Optical Engineering ; v. 55