rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Technological advances in micro and submicro photofabrication imagery
    sub title: [seminar], August 21-23, 1974, San Diego, California
  title info:
    title: Photofabrication imagery
  name:
    name part: Graf, J. M.
  name:
    name part: Converse, William.
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: cau
    date issued: 1975
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: viii, 136 pages : illustrations ; 28 cm.
  note: editors, J. M. Graf, William Converse.
  note: On spine: Photofabrication imagery.
  note: Page 136 blank for "Notes."
  note: Includes bibliographical references.
  subject:
    topic: Microelectronics
    genre: Congresses
  subject:
    topic: Masks (Electronics)
    genre: Congresses
  classification: TK7874 .T43
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 55
  identifier: 76357435
  identifier: https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/0055.toc
  related item:
    location:
      url: https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/0055.toc
  record info:
    record creation date: 750613
    record change date: 20230320205720.9
    record identifier: in00000446688