Cover Image

Silicon processing for the VLSI era /

Bibliographic Details
Main Author: Wolf, Stanley, 1943-
Other Authors: Tauber, Richard N.
Format: Book
Language:English
Published: Sunset Beach, CA : Lattice Press, [1986-]
Subjects:
Integrated circuits > Very large scale integration.
Silicon.
Table of Contents:
  • v. 1. Process technology
  • v. 2. Process integration
  • v. 3. The submicron mosfet
  • v. 4. Deep-submicron process technology.