Silicon processing for the VLSI era /

Bibliographic Details
Main Author:	Wolf, Stanley, 1943-
Other Authors:	Tauber, Richard N.
Format:	Book
Language:	English
Published:	Sunset Beach, CA : Lattice Press, [1986-]
Subjects:	Integrated circuits > Very large scale integration. Silicon.

Description
Physical Description:	4 volumes : illustrations ; 25 cm.
Bibliography:	Includes bibliographical references and index.