Wolf, S., & Tauber, R. N. (1986). Silicon processing for the VLSI era. Lattice Press.
Chicago Style (17th ed.) CitationWolf, Stanley, and Richard N. Tauber. Silicon Processing for the VLSI Era. Sunset Beach, CA: Lattice Press, 1986.
MLA (9th ed.) CitationWolf, Stanley, and Richard N. Tauber. Silicon Processing for the VLSI Era. Lattice Press, 1986.
Warning: These citations may not always be 100% accurate.