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Epitaxial silicon technology /

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Bibliographic Details
Other Authors: Baliga, B. Jayant, 1948-
Format: Book
Language:English
Published: Orlando : Academic Press, 1986.
Subjects:
Semiconductors > Design and construction.
Silicon crystals > Growth.
Epitaxy.
Table of Contents:
  • Silicon vapor phase epitaxy / H.M. Liaw and J.W. Rose
  • Silicon molecular beam epitaxy / Subramanian S. Iyer
  • Silicon liquid phase epitaxy / B. Jayant Baliga
  • Silicon on sapphire heteroepitaxy / Prahalad K. Vasudev
  • Silicon-on-insulator epitaxy / Hon Wai Lam.