rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Epitaxial silicon technology
  name:
    name part: Baliga, B. Jayant
    name part: 1948-
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: flu
    date issued: 1986
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: viii, 328 pages : illustrations ; 24 cm.
  table of contents: Silicon vapor phase epitaxy / H.M. Liaw and J.W. Rose -- Silicon molecular beam epitaxy / Subramanian S. Iyer -- Silicon liquid phase epitaxy / B. Jayant Baliga -- Silicon on sapphire heteroepitaxy / Prahalad K. Vasudev -- Silicon-on-insulator epitaxy / Hon Wai Lam.
  note: edited by B. Jayant Baliga.
  note: Includes bibliographies and index.
  subject:
    topic: Semiconductors
    topic: Design and construction
  subject:
    topic: Silicon crystals
    topic: Growth
  subject:
    topic: Epitaxy
  classification: TK7871.85 .E65 1986
  classification: 621.3815/2
  identifier: 0120771209
  identifier: 86003524
  record info:
    record content source: DLC
    record creation date: 860326
    record change date: 20151012073220.0
    record identifier: in00000436779