Advanced processing and characterization of semiconductors III : 22-24 January 1986, Los Angeles, California /
| Corporate Authors: | , |
|---|---|
| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE--the International Society for Optical Engineering,
[1986]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 623. |
| Subjects: |
| Physical Description: | vi, 272 pages : illustrations ; 28 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0892526580 (pbk.) |