APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, American Association of Physicists in Medicine, Sadana, D. K., & Current, M. I. (1986). Advanced processing and characterization of semiconductors III: 22-24 January 1986, Los Angeles, California. SPIE--the International Society for Optical Engineering.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, American Association of Physicists in Medicine, Devendra K. Sadana, and Michael I. Current. Advanced Processing and Characterization of Semiconductors III: 22-24 January 1986, Los Angeles, California. Bellingham, Wash., USA: SPIE--the International Society for Optical Engineering, 1986.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Advanced Processing and Characterization of Semiconductors III: 22-24 January 1986, Los Angeles, California. SPIE--the International Society for Optical Engineering, 1986.