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| LEADER |
00000cam a2200000 a 4500 |
| 001 |
in00000423708 |
| 005 |
20151012060842.0 |
| 008 |
850917s1985 waua b 10000 eng |
| 010 |
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|a 85062883
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| 020 |
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|a 0892526009 (pbk.)
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| 035 |
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|a (OCoLC)13243583
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| 035 |
|
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|9 ABV4112AM
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| 039 |
0 |
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|a 2
|b 3
|c 3
|d 3
|e 3
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| 040 |
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|a DLC
|c DLC
|d TXA
|d UtOrBLW
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| 049 |
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|a TXAM
|c [A09091550]
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| 050 |
0 |
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|a TK7874
|b .M488 1985
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| 082 |
0 |
|
|a 621.381/73
|2 19
|
| 245 |
0 |
0 |
|a Micron and submicron integrated circuit metrology :
|b August 22-23, 1985, San Diego, California /
|c Kevin M. Monahan, chairman/editor ; cooperating organizations, Optical Sciences Center/University of Arizona, Institute of Optics/University of Rochester.
|
| 264 |
|
1 |
|a Bellingham, Wash., USA :
|b SPIE--International Society for Optical Engineering,
|c 1985.
|
| 300 |
|
|
|a vi, 223 pages :
|b illustrations ;
|c 28 cm.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
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|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a Proceedings of SPIE--The International Society for Optical Engineering ;
|v v. 565
|
| 504 |
|
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|a Includes bibliographies.
|
| 650 |
|
0 |
|a Integrated circuits
|x Measurement
|x Congresses.
|
| 650 |
|
0 |
|a Integrated circuits
|x Testing
|v Congresses.
|
| 700 |
1 |
|
|a Monahan, Kevin M.
|
| 710 |
2 |
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|a University of Arizona.
|b Optical Sciences Center.
|
| 710 |
2 |
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|a University of Rochester.
|b Institute of Optics.
|
| 710 |
2 |
|
|a Society of Photo-optical Instrumentation Engineers.
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 565.
|
| 999 |
|
|
|a MARS
|
| 999 |
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|t 0
|
| 952 |
f |
f |
|p ric
|a Texas A&M University
|b Rellis Campus
|c Joint Library Facility
|d Remote Storage
|t 0
|e TK7874 .M488 1985
|h Library of Congress classification
|i unmediated -- volume
|m A14809091550
|
| 998 |
f |
f |
|a TK7874 .M488 1985
|t 0
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|