Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California /

Bibliographic Details
Corporate Authors:	University of Arizona. Optical Sciences Center, University of Rochester. Institute of Optics, Society of Photo-optical Instrumentation Engineers
Other Authors:	Monahan, Kevin M.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE--International Society for Optical Engineering, 1985.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 565.
Subjects:	Integrated circuits > Measurement > Congresses. Integrated circuits > Testing > Congresses.