APA (7th ed.) Citation

University of Arizona. Optical Sciences Center, University of Rochester. Institute of Optics, Society of Photo-optical Instrumentation Engineers, & Monahan, K. M. (1985). Micron and submicron integrated circuit metrology: August 22-23, 1985, San Diego, California. SPIE--International Society for Optical Engineering.

Chicago Style (17th ed.) Citation

University of Arizona. Optical Sciences Center, University of Rochester. Institute of Optics, Society of Photo-optical Instrumentation Engineers, and Kevin M. Monahan. Micron and Submicron Integrated Circuit Metrology: August 22-23, 1985, San Diego, California. Bellingham, Wash., USA: SPIE--International Society for Optical Engineering, 1985.

MLA (9th ed.) Citation

University of Arizona. Optical Sciences Center, et al. Micron and Submicron Integrated Circuit Metrology: August 22-23, 1985, San Diego, California. SPIE--International Society for Optical Engineering, 1985.