Micromachining and micropackaging of transducers /
| Corporate Author: | Workshop on Micromachining and Micropackaging of Transducers |
|---|---|
| Other Authors: | Fung, Clifford D., 1947- |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Amsterdam ; New York :
Elsevier ; Elsevier Science Pub. Co.,
1985.
|
| Series: | Studies in electrical and electronic engineering ;
20. |
| Subjects: |
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