Micromachining and micropackaging of transducers /
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| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Amsterdam ; New York :
Elsevier ; Elsevier Science Pub. Co.,
1985.
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| Series: | Studies in electrical and electronic engineering ;
20. |
| Subjects: |
| Item Description: | Papers from the Workshop on Micromachining and Micropackaging of Transducers, organized by the faculty associated with the Semiconductor Chemical Transducer Resource at Case Western Reserve University, on Nov. 7-9, 1984. |
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| Physical Description: | viii, 244 pages : illustrations ; 25 cm. |
| Bibliography: | Includes bibliographies. |
| ISBN: | 0444425608 : |