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Advances in resist technology and processing III : 10-11 March 1986, Santa Clara, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Willson, C. G. (C. Grant), 1939-
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1986]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 631.
Subjects:	Photoresists > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/0631.toc?SSO=1

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