APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers & Willson, C. G. (1986). Advances in resist technology and processing III: 10-11 March 1986, Santa Clara, California. SPIE--the International Society for Optical Engineering.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers and C. G. Willson. Advances in Resist Technology and Processing III: 10-11 March 1986, Santa Clara, California. Bellingham, Wash., USA: SPIE--the International Society for Optical Engineering, 1986.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers and C. G. Willson. Advances in Resist Technology and Processing III: 10-11 March 1986, Santa Clara, California. SPIE--the International Society for Optical Engineering, 1986.