Tables of ion implantation spatial distributions /
| Other Authors: | Burenkov, A. F. (Aleksandr Fedorovich), Amoretty, S. J. |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York :
Gordon & Breach Science Publishers,
[1986]
|
| Edition: | English ed., rev. and enl. / |
| Subjects: |
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