Tables of ion implantation spatial distributions /
| Other Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York :
Gordon & Breach Science Publishers,
[1986]
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| Edition: | English ed., rev. and enl. / |
| Subjects: |
| Item Description: | Translation of: Tablitsy parametrov prostranstvennogo raspredeleniia ionno-implantirovannykh primesei. "Published under license by OPA Ltd. for Gordon and Breach Science Publishers S.A." Includes index. |
|---|---|
| Physical Description: | viii, 462 pages : illustrations ; 23 cm. |
| Bibliography: | Bibliography: pages 52-55. |
| ISBN: | 2881240712 (Switzerland) |