Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA /

Bibliographic Details

Corporate Author:	Pfefferkorn Conference Monterey, Calif.
Other Authors:	Kyser, David F.
Format:	Conference Proceeding Book
Language:	English
Published:	AMF O'Hare, Ill. : Scanning Electron Microscopy, [1984]
Subjects:	Electron beams. Electron microscopy. Lithography, Electron beam.