rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Silicides for VLSI applications
  title info:
    title: Silicides for V.L.S.I. applications
  name:
    name part: Murarka, S. P.
    role:
      role term: creator
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: nyu
    date issued: 1983
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xi, 200 pages : illustrations ; 24 cm.
  note: by S.P. Murarka.
  note: Includes bibliographical references and indexes.
  subject:
    topic: Silicides
  subject:
    topic: Electronics
    topic: Materials
  subject:
    topic: Integrated circuits
    topic: Very large scale integration
  classification: TK7871.15.S54 M87 1982
  classification: 621.381/73
  identifier: 0125112203
  identifier: 82016414
  record info:
    record content source: DLC
    record creation date: 820902
    record change date: 20151011104026.0
    record identifier: in00000393622