Cover Image

Applications of plasma processes to VLSI technology /

Bibliographic Details
Other Authors: Sugano, Takuo, 1931-
Format: Book
Language:English
Published: New York : Wiley, [1985]
Subjects:
Semiconductors > Etching.
Integrated circuits > Very large scale integration > Design and construction.
Plasma etching.
Vapor-plating.
Description
Item Description:Translation of: Handotai purazuma purosesu gijutsu.
"A Wiley-Interscience publication."
Includes index.
Physical Description:xiv, 394 pages : illustrations ; 24 cm.
Bibliography:Bibliography: pages 369-389.
ISBN:0471869600