rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Vacuum technology, thin films, and sputtering
    sub title: an introduction
  name:
    name part: Stuart, R. V.
    role:
      role term: creator
  type of resource: text
  origin info:
    place:
      place term: nyu
    date issued: 1983
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: viii, 151 pages : illustrations ; 24 cm.
  note: R.V. Stuart.
  note: Includes index.
  subject:
    topic: Vacuum technology
  subject:
    topic: Thin films
  subject:
    topic: Cathode sputtering (Plating process)
  classification: TP156.V3 S78 1983
  classification: 621.5/5
  identifier: 0126747806
  identifier: 82013748
  record info:
    record content source: DLC
    record creation date: 820720
    record change date: 20151011091749.0
    record identifier: in00000378437