Cover Image

Vacuum technology, thin films, and sputtering : an introduction /

Show other versions (1)
Bibliographic Details
Main Author: Stuart, R. V.
Format: Book
Language:English
Published: New York : Academic Press, 1983.
Subjects:
Vacuum technology.
Thin films.
Cathode sputtering (Plating process)
Description
Item Description:Includes index.
Physical Description:viii, 151 pages : illustrations ; 24 cm.
ISBN:0126747806