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VLSI fabrication principles : silicon and gallium arsenide /

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Bibliographic Details
Main Author: Ghandhi, Sorab Khushro, 1928-
Format: Book
Language:English
Published: New York : Wiley, [1983]
Subjects:
Integrated circuits > Very large scale integration.
Silicon.
Gallium arsenide.
Description
Item Description:"A Wiley-Interscience publication."
Physical Description:xi, 665 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0471868337 :