Optical characterization techniques for semiconductor technology : April 1-2, 1981, San Jose, California /

Bibliographic Details
Other Authors:	Aspnes, D. E., So, S. (Samuel S.), Potter, Roy F.
Format:	Book
Language:	English
Published:	Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, 1981.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 276.
Subjects:	Semiconductors > Testing > Optical methods > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/0276.toc

Description
Physical Description:	x, 262 pages : illustrations ; 28 cm.
Bibliography:	Includes bibliographical references and indexes.
ISBN:	0892523093 (pbk.)