Cover Image

The physics of microfabrication /

Show other versions (1)
Bibliographic Details
Main Author: Brodie, Ivor
Other Authors: Muray, Julius J.
Format: Book
Language:English
Published: New York : Plenum Press, [1982]
Subjects:
Microelectronics.
Thin-film circuits.
Description
Physical Description:xix, 503 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0306408635