APA (7th ed.) Citation

Brodie, I., & Muray, J. J. (1982). The physics of microfabrication. Plenum Press.

Chicago Style (17th ed.) Citation

Brodie, Ivor, and Julius J. Muray. The Physics of Microfabrication. New York: Plenum Press, 1982.

MLA (9th ed.) Citation

Brodie, Ivor, and Julius J. Muray. The Physics of Microfabrication. Plenum Press, 1982.