Ion implantation range data for silicon and germanium device technologies /
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Forest Grove, Oregon :
Research Studies Press,
1977.
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| Subjects: |
| Physical Description: | xviii, 170 unnumbered pages : illustrations ; 29 cm. |
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| Bibliography: | Includes bibliographical references. |
| ISBN: | 0893550108 |