rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Silicon nitride for microelectronic applications
  name:
    name part: Milek, John T. (John Theophil)
    name part: 1915-1976
    role:
      role term: creator
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: nyu
    date issued: 1971
    date issued: 9999
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: volumes : illustrations ; 28 cm.
  table of contents: pt. 1. Preparation and properties.--pt. 2. Applications and devices.
  note: [by] John T. Milek.
  note: Includes bibliographies.
  subject:
    topic: Silicon nitride
  subject:
    topic: Microelectronics
  subject:
    topic: Dielectrics
  classification: TK3441.S46 M54
  classification: 621.381/7
  related item:
    title info:
      title: Handbook of electronic materials ; v. 3, 6
  identifier: 0306671034
  identifier: 77023589
  record info:
    record content source: DLC
    record creation date: 710513
    record change date: 20150924161627.0
    record identifier: in00000101899