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Ion implantation in microelectronics : a comprehensive bibliography /

Bibliographic Details
Main Author: Agajanian, A. H.
Format: Book
Language:English
Published: New York : IFI/Plenum, [1981]
Series:Computer science information guides ; v. 1.
Subjects:
Semiconductor doping > Bibliography.
Ion implantation > Bibliography.
Description
Item Description:Includes indexes.
Physical Description:x, 255 pages ; 26 cm.
ISBN:030665198X