Ion implantation /
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Amsterdam : New York :
North-Holland Pub. Co.; American Elsevier,
1973.
|
| Series: | Defects in crystalline solids ;
v. 8. |
| Subjects: |
| Physical Description: | xv, 802 pages with illustrations ; 23 cm. |
|---|---|
| Bibliography: | Includes bibliographies. |
| ISBN: | 0444104887 (American Elsevier) |