rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Ion implantation in semiconductors, silicon and germanium
  name:
    name part: Mayer, James W.
    name part: 1930-
    role:
      role term: creator
  name:
    name part: Eriksson, Lennart
    name part: 1938-
  name:
    name part: Davies, John Arthur
    name part: 1927-
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: nyu
    date issued: 1970
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xiii, 280 pages : illustrations ; 24 cm.
  note: [by] James W. Mayer, Lennart Eriksson and John A. Davies.
  note: Includes bibliographical references.
  subject:
    topic: Ion implantation
  subject:
    topic: Semiconductors
  classification: TK7871.85 .M38
  identifier: 0124808506
  identifier: 75107563
  record info:
    record content source: DLC
    record creation date: 700825
    record change date: 20150925085051.0
    record identifier: in00000093011