Ion implantation in semiconductors, silicon and germanium /

Bibliographic Details
Main Author: Mayer, James W., 1930-
Other Authors: Eriksson, Lennart, 1938-, Davies, John Arthur, 1927-
Format: Book
Language:English
Published: New York : Academic Press, 1970.
Subjects:

MARC

Tag First Indicator Second Indicator Subfields
LEADER 00000cam a2200000 4500
001 in00000093011
005 20150925085051.0
008 700825s1970 nyua b 00110 eng
010 |a  75107563  
020 |a 0124808506 
035 |a (OCoLC)00092308 
035 |9 AAL1584AM 
040 |a DLC  |c DLC  |d m.c.  |d TXA  |d UtOrBLW 
049 |a TXAM  |c [1400833] 
050 0 0 |a TK7871.85  |b .M38 
100 1 |a Mayer, James W.,  |d 1930- 
245 1 0 |a Ion implantation in semiconductors, silicon and germanium /  |c [by] James W. Mayer, Lennart Eriksson and John A. Davies. 
264 1 |a New York :  |b Academic Press,  |c 1970. 
300 |a xiii, 280 pages :  |b illustrations ;  |c 24 cm. 
336 |a text  |b txt  |2 rdacontent 
337 |a unmediated  |b n  |2 rdamedia 
338 |a volume  |b nc  |2 rdacarrier 
504 |a Includes bibliographical references. 
650 0 |a Ion implantation. 
650 0 |a Semiconductors. 
700 1 |a Eriksson, Lennart,  |d 1938- 
700 1 |a Davies, John Arthur,  |d 1927- 
999 |a MARS 
999 f f |s 131908a1-5802-3d3e-a98c-45297719a71b  |i 8dc74cdf-6676-3811-a00b-487464b8f0ac  |t 0 
952 f f |p ric  |a Texas A&M University  |b Rellis Campus  |c Joint Library Facility  |d Remote Storage  |t 0  |e TK7871.85 .M38  |h Library of Congress classification  |i unmediated -- volume  |m A14805502096 
952 f f |p ric  |a Texas A&M University  |b Rellis Campus  |c Joint Library Facility  |d Remote Storage  |t 0  |e TK7871.85 .M38  |h Library of Congress classification  |i unmediated -- volume  |m A14809486454 
952 f f |a Texas A&M University  |b College Station  |c Sterling C. Evans Library  |d Evans: Library Stacks  |t 0  |e TK7871.85 .M38  |h Library of Congress classification 
998 f f |a TK7871.85 .M38  |t 0  |l Remote Storage 
998 f f |a TK7871.85 .M38  |t 0  |l Evans: Library Stacks