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Ion implantation in semiconductors, silicon and germanium /

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Bibliographic Details
Main Author: Mayer, James W., 1930-
Other Authors: Eriksson, Lennart, 1938-, Davies, John Arthur, 1927-
Format: Book
Language:English
Published: New York : Academic Press, 1970.
Subjects:
Ion implantation.
Semiconductors.
Description
Physical Description:xiii, 280 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references.
ISBN:0124808506